Nanomeghyas

Nanomeghyas

Physics and Technology of Chemical Vapor Deposition (CVD) of Two-Dimensional Heterostructures in Photodetector Applications

Document Type : Original Article

Authors
1 Center for Nanoscience and Nanotechnology, Institute for Convergence Science & Technology, Sharif University of Technology, Tehran 14588-89694, Iran
2 Department of Physics, Sharif University of Technology, Tehran, 11155-9161, Iran Center for Nanoscience and Nanotechnology, Institute for Convergence Science & Technology, Sharif University of Technology, Tehran 14588-89694, Iran
3 Department of Physics, University of Tehran, Tehran, Iran
10.22034/ns.2026.2090755.1430
Abstract
In this review article, recent advances in the synthesis and applications of two-dimensional (2D) materials are systematically examined, with a particular emphasis on chemical vapor deposition (CVD) techniques. First, the fundamental growth principles and key parameters governing the CVD process—including temperature, pressure, carrier gas flow rate, precursor type, and substrate characteristics—are discussed in detail. Subsequently, common CVD approaches such as APCVD, LPCVD, PECVD, MOCVD, and LECVD are compared in terms of growth capability, advantages, and inherent limitations. In the following section, strategies for achieving controlled growth of single-crystalline 2D materials are reviewed, along with the influence of critical factors such as grain size, layer number, morphology, crystal orientation, crystal phase, doping, and structural defects on crystallinity and optoelectronic properties. In addition, lateral and vertical heterostructures are highlighted, with particular attention to their role in band engineering and carrier transport modulation.

Another major part of this review focuses on 2D material-based photodetectors, where the fundamental detection mechanisms—including photoconductive, photovoltaic, photogating, and photothermal effects—are analyzed. Key performance metrics such as responsivity, quantum efficiency, response time, signal-to-noise ratio, and specific detectivity are also evaluated and compared across different device architectures. Finally, the main challenges in this field are discussed, including wafer-scale growth, defect control, infrared photodetection.
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  • Receive Date 12 April 2026
  • Revise Date 18 May 2026
  • Accept Date 09 June 2026