Nanomeghyas

Nanomeghyas

Magnetoelectric sensor based on coupling of patterned galfenol alloy thin film and aluminum nitride

Document Type : Original Article

Authors
Shahid Beheshti University
Abstract
Magnetic field sensors based on magneto-electric structures have various applications in industries such as biosensors. Through simulation using the finite element method (FEM), sensors with appropriate main frequency and sensitivity can be designed, paving the way for the fabrication of bio-magnetic sensors. In this article, we utilized magneto-electric structures based on patterned Galfenol alloy nanostructures as the magnetostrictive layer and aluminum nitride as the piezoelectric layer. The designed cantilever-type structure has a magnetoelectric coefficient of 5850 V/cm.Oe at the resonance frequency of 3051.9 Hz and is capable of measuring magnetic fields in the range of one Pico tesla.
Keywords
Subjects

[1] A.A. Basheer, “Advances in the smart materials applications in the aerospace industries,” Aircraft Engineering and Aerospace Technology 2020., 92(7), 1027-1035.
[2] T. Kalsoom, N. Ramzan, S. Ahmed, and M. Ur-Rehman, “Advances in sensor technologies in the era of smart factory and industry 4.0,” Sensors, 2020,20(23), 6783,.
[3] U. Pili, and R. Violanda, “Measuring a spring constant with a smartphone magnetic field sensor,” Smartphones as Mobile Minilabs in Physics, 2022,201-205,.
[4] D. Murzin, D.J. Mapps, K. Levada, V. Belyaev, A. Omelyanchik, L. Panina, and V. Rodionova, “Ultrasensitive magnetic field sensors for biomedical applications,” Sensors, 2020, 20(6), 1569.
[5] M. Ranjbaran, M.M. Tehranchi, S.M. Hamidi, and S. M. H. Khalkhali, “Relaxation time dependencies of optically detected magnetic resonance harmonics in highly sensitive Mx magnetometers,” Journal of Magnetism and Magnetic Materials, 2019, 469, 522-530,.
[6] K. Rao, H. Liu, X. Wei, W. Wu, C. Hu, J. Fan, J. Liu, and L. Tu, “A high-resolution area-change-based capacitive MEMS tilt sensor,” Sensors and Actuators A: Physical, 2020, 313, 112191,.
[7] N.A. Spaldin, “Magnetic materials: fundamentals and applications,” Cambridge university press, 2010.
[8] A.G. Olabi, and A. Grunwald, “Design and application of magnetostrictive materials,” Materials & Design, 2008, 29(2), 469-483.
[9] F. Fang, C. Zhao, and W. Yang, “Thickness effects on magnetoelectric coupling for Metglas/PZT/Metglas laminates,” Science China Physics, Mechanics and Astronomy, 2011,54, 581-585.
[10] W. Eerenstein, N.D. Mathur, and J.F. Scott, “Multiferroic and magnetoelectric materials,” nature, 2006,442(7104), 759-765.
[11] M.I. Bichurin, D.A. Filippov, V.M. Petrov, V.M. Laletsin, N. Paddubnaya, and G. Srinivasan, “Resonance magnetoelectric effects in layered magnetostrictive-piezoelectric composites,” Physical Review B, 2003, 68(13), 132408.
[12] M. Haghparast, M.M. Tehranchi, and S.M. Hamidi, “Magneto electric sensor based on cantilever coated galfenol/AlN structure,” Journal of Magnetism and Magnetic Materials, 2023, 572, 170602,.
[13] M.I. Bichurin, V.M. Petrov, and R.V. Petrov, “Direct and inverse magnetoelectric effect in layered composites in electromechanical resonance range: A review,” Journal of Magnetism and Magnetic Materials, 2012, 324(21), 3548-3550.
[14] M. Bichurin, R. Petrov, O. Sokolov, V. Leontiev, V. Kuts, D. Kiselev, and Y. Wang, “Magnetoelectric magnetic field sensors: A review,” Sensors, 2021,21(18), 6232,.
[15] C. Lu, H. Zhou, L. Li, A. Yang, C. Xu, Z. Ou, J. Wang, X. Wang, and F. Tian, “Split-core magnetoelectric current sensor and wireless current measurement application,” Measurement, 2022,188, 110527,.
[16] http://www.tdvib.com/galfenol/
[17] B. Xie, F. Ding, Z. Dong, H. Shang, D. Huang, and H. Gu, “FEM analysis of piezoelectric film as IDT on the diamond substrate to enhance the quality factor of SAW devices,” Diamond and Related Materials, 2020,102, 107659.
 
 
 

  • Receive Date 02 May 2023
  • Revise Date 20 June 2023
  • Accept Date 30 July 2023